HighAcpectRatio temperature_control Yeditepe_University TungstenThinFilmDeposition SmalScan Au111 Techcomp Yttria_stabilized_Zirconia Imprint LiftHeight Mosfet Dimethicone Hafnia Holes cross section PtfeMembrane Mapping NtuEee ScanningKelvinProbeMicroscopy Reading #EC Regensburg Sadowski block_copolymer Nanopattern PolymerBlend MLCC Jason EFM Lateral_Force_Microscopy LateralForce Annealing AlkaneFilm suspended_graphene C36H74