Pyroelectric Glass Polyimide Flake AtomicLayer Oxidation Current Phthalocyanine lithography piezoelectric force microscopy MechanicalProperty ElectroChemical Polarization Zhi Film dielectric trench temp_control IRDetector ThinFilm hetero_structure Terrace Microchannel CVD DataStorage CrAu fluoroalkane PolycrystallineFerroelectricBCZT SingleCrystal CalciumHydroxide Mapping Wildtype Polyvinylidene Composition Adhesive Fet