Trench Permalloy LateralForce MetalCompound LiNbO3 Hydroxyapatite SRAM Etch FastScan Self-assembledMonolayer Polyvinylidene Pyroelectric PVAC Optoelectonics oxide_layer HydroGel sputter Nanopattern ThermalProperties BismuthVanadate DLaTGS Cross-section Mechinical Praseodymium solar_cell AM_SKPM ito_film HexagonalBN Roughness DataStorage organic_polymer SSRM AmplitudeModulation Heating Lift