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Silicon FM_SKPM Microchannel BiFeO3 Chemical_Vapor_Deposition LateralForce polyvinyl acetate PtfeFilter atomic_layer Polyaniline SurfaceOxidation Defect Nanotechnology Lateral epitaxy norganic ForceVolume Graphene CntFilm GlassTemp #EC ItoGlass VerticalPFM Composition EFMAmplitude ScanningSpreadingResistanceMicroscopy PinPointMode PolyStylene ShenYang Pinpoint PFM Current lift_mode Dimethicone Ni81Fe19 AEAPDES