PolyimideFilm Change C_AFM Chemical Vapor Deposition PetruPoni_Institute temp Hexacontane Gold Protein Boron Ca10(PO4)6(OH)2 cross section Co/Cr/Pt Memory HanyangUniv DiffractiveOpticalElements SiliconeOxide Trench WS2 Liquid SicMosfet Film plastics Melt alkanes UnivCollegeLondon Microchannel Piranha Semiconductor VerticalPFM align Hole InorganicCompound mechanical property Dental