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SurfaceChange Litho BTO HighResolution Plug FFM Calcite Sio2 Filter PyroelectricDetector Gallium CrAu PhaseChange ScanningThermalMicroscopy ImideMonomer SICM Bacteria Cancer TemperatureControllerStage University_of_Regensburg NanoLithography semifluorinated_alkane Adhesive Granada Copper HBN Inorganic_Compound AtomicLayer PtfeMembrane Dental Permalloy ScratchMode Melt OpticalWaveguide multi_layer