MESA structure Vortex CHRYSALIS_INC chemical_compound thermal_property nanomechanical Hexatriacontane Wafer Edwin DOE Vacuum PinpointPFM CopperFoil Phthalocyanine plastic Biology self_assembly DeflectionOptics Mechanical&nanotechnology Sadowski ImideMonomer mono_layer Defects dielectric_trench SmalScan Sidewall Metal HighResolution Transparent YttriaStabilizedZirconia frequency_modulation Hydroxyapatite Oxidation CrAu LMF