layers Wildtype Defects TungstenThinFilmDeposition HafniumDioxide rubber Scanning_Thermal_Microscopy Laser fluorocarbon Lift DiffractiveOpticalElements Fet PVA OxideLayer Oxidation SSRM HighAcpectRatio ScanningSpreadingResistanceMicroscopy DomainSwitching Step Force-distance Inorganic SurfaceOxidation CastIron CHRYSALIS_INC Barium_titanate TemperatureControllerStage Modulus Sadowski I-VSpectroscopy Floppy BTO PDMS molecule Trench