Al2O3 TungstenDeposition PolycrystallineFerroelectricBCZT polymeric_arrays vertical_PFM OpticalWaveguide StainlessSteel Laser Mechanical&nanotechnology Praseodymium TemperatureControllerAFM StyreneBeads high_resolution PhaseChange Temasek_Lab ScratchMode CNT Bismuth GlassTemperature GranadaUniv Trench Yeditepe_University Phosphide Piezoelectric KPFM 2-vinylpyridine Boron SKKU CopperFoil TiO2 SFAs SiliconCrystal HexagonalBoronNitride FAFailureAnlaysis oxide_layer