fluoroalkane atomic_layer lithography FM_SKPM rubber Conductance SiliconeOxide IndiumTinOxide PVAC LDPE VerticalPFM ThinFilm TriGlycineSulphate AM_KPFM Polyaniline Thermal ConductingPolymer molecular_beam SingleLayer BariumTitanate fluorocarbon Yttria_stabilized_Zirconia PatternedSapphireSubstrat WPlug AM_SKPM Polyvinylidene EvatecAG Foil OpticalWaveguides Calcium KelvinProbeForceMicroscopy Pores Co/Cr/Pt CrAu Annealing