MagneticArray Heat Aluminum ScratchMode dielectric_trench Sadowski TungstenDeposition MESA structure Electrode Trench Phosphide Insulator strontiu_titanate LFM Hafnia Lift CopperFoil Growing HfO2 Fujian Ferroelectric HafniumDioxide Polyvinylidene Cobalt-dopedIronOxide fe_nd_b Calcite Mechanical&nanotechnology Chemical Vapor Deposition StainlessSteel NtuEee conductive PtfeMembrane SelfAssembly Piezoresponse MagneticForceMicroscopy