ito_film SingleLayer SiliconCrystal CVD ForceDistanceSpectroscopy Polydimethylsiloxane AEAPDES INSPParis FrequencyModulation TappingMode multi_layer MagneticForce OpticalModulator silicon_carbide SurfaceChange University_of_Regensburg Dental molecular_beam biocompatible ForceVolumeMapping Corrosion LateralForce Annealing Biofilm Hafnium_dioxide Fluoride molecule electrospinning Pinpoint Cobalt-dopedIronOxide LifeScience Polytetrafluoroethylene Wildtype PpLdpe TemperatureControl