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Hexylthiophene Gold TiO2 FFM NusEce EvatecAG ThinFilm Silver Sidewall self_healing Pattern Melt Modulus Inorganic_Compound Inorganic ChemicalCompound Nickel GaN SetpointMode SKPM Polypropylene cross section Non-ContactMode lithography PvdfFilm PolymerBlend PtfeFilter AlkaneFilm CVD AtomicLayer Aluminium_Oxide DeflectionOptics SSRM Piezoresponse Hole