SThM Holes YszSubstrate PhaseChange ThermalDetectors PinpointPFM Step Cell HardDisk SRAM LMF Oxidation LightEmiting AtomicSteps FM_SKPM EFMAmplitude Spincast PetruPoni_Institute GalliumPhosphide Gong oxide_layer FailureAnalysis Force-distance Implant Optic PolyimideFilm PFM Non-ContactMode multi_layer Mechanical single_layer Solar SurfaceOxidation Celebration thermal_conductivity