PFM HardDisk Pore InLiquid Reading SmallScan PVA HanyangUniv Wonseok norganic PUR EvatecAG Piezo FFM Yttria_stabilized_Zirconia Lift Microchannel MolybdenumDisulfide ElectrostaticForceMicroscopy Defect FM_KPFM IMT_Bucharest LFM ImideMonomer Hexacontane Pattern AnodizedAluminumOxide Oxide Kevlar AlkaneFilm lithography Wafer membrane CHRYSALIS_INC fluoroaalkane