MESA structure molecule Microchannel STO Galfenol SoftSample Polystyrene Polydimethylsiloxane exfoliate Piezoresponse ReflexLens HighAcpectRatio PhthalocyaninePraseodymium FloppyDisk CeramicCapacitor layers Grain Etch vertical_PFM FM_SKPM non_contact Piezo ThinFilm semifluorinated_alkanes Chemical_Vapor_Deposition SICM MagneticArray UnivOfMaryland Copper mechanical property small_scan CuParticle YszSubstrate Tin disulfide Ceramics