Electical&Electronics Filter GalliumPhosphide Switching Etch HanyangUniv Korea Lateral_Force_Microscopy HiVacuum LeakageCurrent dielectric_trench AM_SKPM chemical_compound SmalScan TemperatureControl ShenYang YszSubstrate C60H122 optoelectronics CrAu ULCA Device StyreneBeads WS2 Graphene FastScan HydroGel Conductance HexacontaneFilm NusEce Morphology Mosfet Terrace Mobile Pinpoint PFM