dielectric_trench Co/Cr/Pt mechanical_property HighAcpectRatio mechanical property fluorocarbon Butterfly ferromagnetic dielectric trench atomic_layer hydrocarbon amplitude_modulation Self-assembledMonolayer ThermalProperties University_of_Regensburg CastIron Conductance CalciumHydroxyapatite CompactDisk Molybdenum_disulfide Protein optoelectronics Lateral Switching MESA structure Magnetic Solution Modulus TemperatureControllerStage HexacontaneFilm Current silicon_carbide Microchannel Hydroxyapatite HBN