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Lithography on compact disk
Scanning Conditions
- System: NX10
- Scan Mode: XEL
- Cantilever: NCHR (k=42N/m, f=300kHz)
- Scan Size: 7.5μm×7.5μm
- Scan Rate: 0.5Hz
- Pixel: 256×256
- Scan Mode: XEL
- Cantilever: NCHR (k=42N/m, f=300kHz)
- Scan Size: 7.5μm×7.5μm
- Scan Rate: 0.5Hz
- Pixel: 256×256