CopperFoil Co/Cr/Pt ContactMode LateralForceMicroscopy atomic_steps Conducting LaAlO3 PDMS NCM\ mechanical_property Holes Organic Varistor WWafer aluminum_nitride PinpointNanomechanicalMode Device membrane Battery Materials Topography LFM Adhesion HexacontaneFilm LiftHeight Litho YttriaStabilizedZirconia HighAspect Heat AnodizedAluminumOxide Tin disulfide Sic Hexatriacontane ULCA TPU