Indent MfmPhase CaMnO3 SmalScan dielectric_trench Fluoride TemperatureControl ScanningThermalMicroscopy AEAPDES Multiferroic_materials Reading LiftHeight ForceDistanceSpectroscopy Mechanical Aluminium_Oxide PpLdpe silicon_carbide single_layer AtomicLayer Sulfur MESA structure Ananth EvatecAG Etch Writing Gallium_Arsenide MechanicalProperties Heat kelvin probe force microscopy Conducting AtomicSteps CalciumHydroxide StrontiumTitanate LateralPFM Non-ContactMode