AtomicSteps AtomicLayer TungstenThinFilmDeposition AIN Topography hydrocarbon ForceMapping SiliconOxide Permalloy Ni-FeAlloy Spain FFM Blood UnivCollegeLondon PvdfBead CVD Liquid IMT_Bucharest Indium_tin_oxide Co/Cr/Pt ThinFilm Layer ContactMode SiWafer NeodymiumMagnets Lateral Wonseok Varistor Force-distance silicon_carbide mechanical property PyroelectricDetector StainlessSteel Conductive AFM Vac