Array Dental HiVacuum EFMAmplitude Worcester_Polytechnic_Institute Mapping Switching Aluminium_Oxide fe_nd_b aluminum_nitride CastIron KAIST Conducting Oxide PinPointMode Reading TempControl Al2O3 Liquid silicon_oxide Korea UTEM Carbon P3HT MESA structure Polymer BTO Treatment Polyethylene InorganicCompound membrane MechanicalProperty lithography Composite TemperatureControlledAFM