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PVA Composition Calcium NusEce IRDetector fluoroalkane Steps nanobar CrAu Magnetic Wonseok ItoGlass hard_disk Resistance Chemical_Vapor_Deposition CuParticle ThermalProperties Conductive AFM Heat Hexacontane Bismuth GalliumPhosphide molecular_beam Granada Flake hetero_structure GlassTemp StyreneBeads MfmAmplitude PhaseImaging silicon_oxide thermoplastic_elastomers CopperFoil Litho Ecoli
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CMP test key
Scanning Conditions
- System : NX-Wafer
- Scan Mode: Non-contact
- Scan Rate : 1Hz for 100μm2 / 1.5Hz for 30μm2
- Scan Size : 100μm2, 30μm2
- Pixel Size : All 1024×512
- Cantilever : CMCL-AC240TS (k=2N/m, f=70kHz)