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GlassTemperature Polydimethylsiloxane TyphimuriumBiofilm HACrystal food Polymer FM_SKPM Hole Mechinical PhaseChange MembraneFilter Array Barium_titanate Protein Chromium CopperFoil WPlug Ptfe Roughness Trench Water Optoelectronic SFAs Copper StyreneBeads CntFilm nanobar Layer INSPParis FailureAnalysis Implant ContactModeDot BoronNitride SiWafer LateralForceMicroscopy
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CMP test key
Scanning Conditions
- System : NX-Wafer
- Scan Mode: Non-contact
- Scan Rate : 1Hz for 100μm2 / 1.5Hz for 30μm2
- Scan Size : 100μm2, 30μm2
- Pixel Size : All 1024×512
- Cantilever : CMCL-AC240TS (k=2N/m, f=70kHz)