Ito CVD Organic CHRYSALIS_INC LFM fifber AnodizedAluminumOxide AtomicLayer Optic Cobalt-dopedIronOxide Cobalt SFAs Vacuum Inorganic_Compound temp_control University_of_Regensburg China EPFL Reduction Resistance Pipette Ceramics MESA structure CP-AFM LDPE semifluorinated_alkane ScanningTunnelingMicroscopy LiIonBattery BFO PolymerPatterns Pinpoint PFM Oxide LiftHeight AM-KPFM Styrene