Deposition CaMnO3 Polyimide polyvinyl acetate Metal cross section EPFL self_healing Tin sulfide Sperm single_layer CHRYSALIS_INC TemperatureControl SrTiO3 Chemical Vapor Deposition Change semifluorinated_alkane light_emitting Bismuth AlkaneFilm contact oxide_layer #Materials DOE nanomechanical Adhesion Implant WWafer food University_of_Regensburg Croatia Materials DataStorage Molybdenum TungstenThinFilmDeposition